■Chemical type that is resistant to exhausting corrosive gases
■Structure that is resistant to unexpected atmospheric entry
■ Strong against external shocks
■Serial communication possible
■Safety standards
NRTL/SEMI-S2/CE
・Semiconductor manufacturing
・Electron gun exhaust, ion source exhaust
・FPD manufacturing
・Surface treatment, surface modification
・Manufacturing various electronic components
・Tube manufacturing, optical parts manufacturing
・Accelerators, radiation facilities, nuclear fusion research
·Heat treatment
·Research and Development
Inquiry - TG203VW
