600m3/hr (353cfm)
ultimate vacuum 2x10-3mbar (1.5x10-3torr)
inlet ISO1000
outlet NW40
208v,3ph,60hz.,
The Edwards iL600N iL 600N system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chambers. This ensures a clean pumping system without back-migration of oil into the system being evacuated.
The iL600N Series Drypumps have been specifically designed to provide reliable operation over a wide range of applications. The unique cantilevered shaft design eliminates bearings from the high vacuum end of the dry pump and booster.
These Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
Inquiry - iL600N
